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Schematic phase diagram of (a) au-si and (b) sn-si systems. figurePhase diagram of the au-si system. Al \ \si phase diagram [39].5: the al-si binary phase diagram [32]..

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Au/c-si phase diagram (ref. 17) and relative si concentrations in the

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Bonding silicon intermediate wafer2: au-si phase diagram [19] , the eutectic point corresponds to the .

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Comparison of the Au-Si phase diagram for the bulk and for droplets (r

Au/c-Si phase diagram (Ref. 17) and relative Si concentrations in the

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9-Phase diagram for Au-Si system. Adapted from [132]. | Download